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Graphenea increases capacity with AIXTRON BM Pro

Marko Spasenovic CVD graphene graphene graphene production capacity Large area graphene

Graphenea announces a new order for Aixtron's BM Pro chemical vapor deposition system. Aixtron is a worldwide leading provider of deposition equipment to the semiconductor industry.

AIXTRON’s BM Pro system, now in its 3rd generation, has been specially optimized for high quality graphene deposition with Graphenea’s tool having the highest throughput to date. Graphenea placed the order for an 8-inch configuration deposition system during the first quarter of 2016. The tool is scheduled for delivery later this year which will be followed by the installation and commissioning of the system by AIXTRON’s European support team.

Photo: Graphenea Headquarters in San Sebastian, Spain.

Graphenea’s Scientific Director, Dr. Amaia Zurutuza, comments: “Our existing AIXTRON BM Pro system has been a reliable workhorse in producing graphene for our needs. In taking the graphene to the next level, we chose an AIXTRON BM Pro tool again because of its scalable technology which allows meeting our graphene production needs of even higher throughput and larger areas. Also, the system meets our requirements of high temperature operation, combined with excellent uniformity. System flexibility, low maintenance, automatic recipe execution and process support were other compelling reasons for selecting AIXTRON again.”

Photo: Graphenea scientists working on the existing Aixtron BM Pro system.

Graphenea’s CEO, Jesus de la Fuente, comments: “This new system is part of our large investment program to introduce graphene technology in commercial devices. Our focus is to integrate graphene materials in CMOS (complementary metal-oxide-semiconductor) fabs starting with 8-inch wafers and 12-inch in the near future”.

See press release on Aixtron's website [link].

About Graphenea:

Graphenea, a leading company in graphene production and a venture backed by Repsol and CDTI, was established in 2010, and has since grown to be one of the world's largest providers of graphene. The company is headquartered at the nanotechnology cluster CIC nanoGune in San Sebastian, Spain and the MIT campus in Boston. Graphenea employs 15 people and exports graphene materials to more than 400 customers in 55 countries. The company has focused on constant improvement of graphene quality, becoming a supplier customers can rely on. Graphenea employs a team of skilled laboratory staff who have brought graphene film production techniques to a new level, offering the same high quality films on any substrate. Graphenea produces CVD graphene wafers up to 4 inches and graphene oxide in volumes up to 5 liters per package. Graphenea partners with large multinationals to develop custom graphene materials for their applications. Its research agility and ability to keep pace with the progress of graphene science and technology has allowed Graphenea to become the largest graphene supplier in the Graphene Flagship, a ten year project of the European Commission worth a billion euros. The company keeps a close relation with the world's leading scientists, regularly publishing scientific articles of the highest level.


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